Some of the features fabricated with micro-grinding on different materials are shown in Fig. 4. Fig. 4. a Micro slot array in silicon using micro slot grinding 25, b Micro fluidic device in glass 2, c Micro-groove s on optical glass 4 and d Micro structures on germanium immersion grating element using micro-grinding 11 6.Free consultation 40 years of industry experience providing one-stop solution
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